Development of a position–velocity–time-modulated two-dimensional ion beam figuring system for synchrotron x-ray mirror fabrication
Author:
Funder
Office of Science
Brookhaven National Laboratory
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference18 articles.
1. Single-nanometer focusing of hard x-rays by Kirkpatrick–Baez mirrors
2. A one-dimensional ion beam figuring system for x-ray mirror fabrication
3. Ion beam etching of a flat silicon mirror surface: A study of the shape error evolution
4. Ion beam finishing technology for high precision optics production;Schindler,2002
5. Study on an effective one-dimensional ion-beam figuring method
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