Ion beam etching of a flat silicon mirror surface: A study of the shape error evolution
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference8 articles.
1. Design parameters for hard x-ray mirrors: the European synchrotron radiation facility;Susini;Optical Engineering,1995
2. Ion beam profiling of aspherical X-ray mirrors
3. Ion beam milling fabrication of a small off-axis ellipsoidal mirror, diffraction limited to 1 μm resolution at 14 nm
4. Polymer pre-treatment by linear anode layer source plasma for adhesion improvement of sputtered TiN coatings
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