Affiliation:
1. Karlsruhe Institute of Technology
2. Vanguard Automation GmbH
3. Institut für Mikroelektronik Stuttgart (IMS CHIPS)
4. SICK AG
Abstract
We demonstrate an optical phased-array equipped with a 3D-printed facet-attached element for shaping and deflection of the emitted beam. The beam shaper combines freeform refractive surfaces with total-internal-reflection mirrors and is in-situ printed to edge-emitting waveguide facets using high-resolution multi-photon lithography, thereby ensuring precise alignment with respect to on-chip waveguide structures. In a proof-of-concept experiment, we achieve a grating-lobe free steering range of
±
30
∘
and a full-width-half-maximum beam divergence of approximately
2
∘
. The concept opens an attractive alternative to currently used grating structures and is applicable to a wide range of integration platforms.
Funder
Bundesministerium für Bildung und Forschung
Deutsche Forschungsgemeinschaft
European Research Council
Alfried Krupp von Bohlen und Halbach-Stiftung
Subject
Atomic and Molecular Physics, and Optics
Cited by
9 articles.
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