Photoresist resolution measurement during the exposure process
Author:
Publisher
The Optical Society
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2. Evaluation of chemical kinetics in positive photoresists using laser desorption ionization;EUR POLYM J;2014
3. Evaluation of chemical kinetics in positive photoresists using laser desorption ionization;European Polymer Journal;2014-10
4. Holographic technique for measurement of the kinetic constant and optical modulation of photosensitive materials;Applied Optics;2010-06-14
5. AZ-1518 Photoresist analysis with synchrotron radiation using high-resolution time-of-flight mass spectrometry;Polymer Degradation and Stability;2007-06
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