Rugate filters fabricated by a radio frequency magnetron sputtering system by use of an optical in situ monitoring technique
Author:
Publisher
The Optical Society
Reference14 articles.
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1. Plasma emission spectroscopy and optical properties of reactive-sputtered silicon oxynitride films;Journal of Physics D: Applied Physics;2024-04-18
2. Plasma emission spectroscopy related to the optical properties of silicon oxynitride films for inhomogeneous filters;Optical Interference Coatings Conference (OIC) 2022;2022
3. Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films;IEICE Transactions on Electronics;2008-10-01
4. Graded refractive-index SiOx infrared filters prepared by reactive magnetron sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2008-03
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