Laser direct-writing lithography equipment system for rapid and μm-precision fabrication on curved surfaces with large sag heights
Author:
Funder
National Natural Science Foundation of China (NSFC)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
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1. SiO2-Based Hybrid Diffractive–Refractive Lenses Fabricated by Femtosecond Laser-Assisted Micromachining
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