Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference14 articles.
1. Optical Aspherizing by Vacuum Evaporation
2. Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method
3. Investigation of Film Thickness Uniformity on Substrates Located Close to the Source Axis
4. Deterministic control of thin film thickness in physical vapor deposition systems using a multi-aperture mask
5. Masking technique for coating thickness control on large and strongly curved aspherical optics
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