Polarized light scattering by microroughness and small defects in dielectric layers
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference18 articles.
1. Polarization of out-of-plane scattering from microrough silicon
2. Angular dependence and polarization of out-of-plane optical scattering from particulate contamination, subsurface defects, and surface microroughness
3. Polarization of light scattered by microrough surfaces and subsurface defects
4. Polarized light-scattering measurements of dielectric spheres upon a silicon surface
5. Scattering of light by slightly rough surfaces or thin films including plasma resonance emission
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