Decomposition of AFM images of ultrasmooth optical surface polished with gas cluster ion beam
Author:
Funder
Russian Science Foundation
Publisher
IOP Publishing
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation
Link
http://iopscience.iop.org/article/10.1088/2051-672X/ab1f49/pdf
Reference20 articles.
1. Evaluation of long-term stability of low thermal expansion coefficient materials using gauge block interferometers
2. Polarized light scattering by microroughness and small defects in dielectric layers
3. Correlation between the substrate roughness and light loss for interference mirror coatings
4. Large area smoothing of optical surfaces by low-energy ion beams
5. Obliquely incident ion beam figuring
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