All-sapphire-based optical fiber pressure sensor with an ultra-wide pressure range based on femtosecond laser micromachining and direct bonding

Abstract

An all-sapphire extrinsic Fabry-Perot interferometer (EFPI) optical fiber pressure sensor with ultra-wide pressure range and high temperature resistance is proposed and experimentally demonstrated. The sensor is fabricated by direct bonding three sapphire wafers, including the sapphire substrate, the sapphire wafer with a through hole, and the sapphire pressure-sensitive diaphragm. A femtosecond (fs) laser is used to inscribe a through hole in the center of the sapphire wafer and roughen the outer surface of the sapphire pressure-sensitive diaphragm. By using original polished surfaces of sapphire wafers with low surface roughness as reflective surfaces of the Fabry-Perot (FP) cavity, the high-quality interference signal can be obtained, thereby improving the measurement accuracy of the sensor. The optical cavity length (OCL) of the proposed sensor changes linearly with the applied pressure in the wide range of 0 - 50 MPa at room temperature, and the pressure sensitivity is 0.0921 µm/MPa. The pressure measurement accuracy reaches 0.31%FS (full scale). High temperature experiments show that the sensor can work stably at 1000 ℃.