Quantum efficiency of black silicon photodiodes at VUV wavelengths
Author:
Funder
U.S. Department of Energy
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference34 articles.
1. Microstructuring of silicon with femtosecond laser pulses
2. The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
3. Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
4. Visible and near-infrared responsivity of femtosecond-laser microstructured silicon photodiodes
5. Enhancing near-infrared avalanche photodiode performance by femtosecond laser microstructuring
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