Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics-Reference-Cited by-同舟云学术

Deep reactive ion etched anti-reflection coatings for sub-millimeter silicon optics

Published:2017-03-24 Issue:10 Volume:56 Page:2796
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Gallardo Patricio A.,Koopman Brian J.,Cothard Nicholas F.,Bruno Sarah Marie M.,Cortes-Medellin German,Marchetti Galen,Miller Kevin H.,Mockler Brenna,Niemack Michael D.,Stacey Gordon,Wollack Edward J.

Funder

National Science Foundation (NSF)

National Aeronautics and Space Administration (NASA)

Kavli Foundation

Publisher

The Optical Society

Reference27 articles.

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