Diffraction by gratings with random fill factor-Reference-Cited by-同舟云学术

Diffraction by gratings with random fill factor

Published:2017-06-19 Issue:18 Volume:56 Page:5253
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Torcal-Milla Francisco Jose,Sanchez-Brea Luis Miguel

Funder

Ministerio de Economía y Competitividad (MINECO) “Ecograb” of “Programa Estatal de Investigacion, Desarrollo e Innovacion Orientada a los Retos de la Sociedad”

Publisher

The Optical Society

Reference24 articles.

1. An interferometer based on the Talbot effect

2. Displacement measurement using the Talbot effect with a Ronchi grating

3. Profilometry by phase-shifted Talbot images

4. Measurement of Wafer Surface Using Shadow Moire´ Technique With Talbot Effect

5. Far field of gratings with rough strips

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