Impact of a counter-rotating planetary rotation system on thin-film thickness and uniformity
Author:
Funder
National Nuclear Security Administration (NNSA)
University of Rochester
New York State Energy Research and Development Authority
Publisher
The Optical Society
Reference5 articles.
1. Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system
2. Analysis of a planetary-rotation system for evaporated optical coatings
3. Meeting thin film design and production challenges for laser damage resistant optical coatings at the Sandia Large Optics Coating Operation
4. Impact of deposition-rate fluctuations on thin-film thickness and uniformity
5. Impact of non-integer planetary revolutions on the distribution of evaporated optical coatings
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