Line-scanning laser scattering system for fast defect inspection of a large aperture surface-Reference-Cited by-同舟云学术

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Line-scanning laser scattering system for fast defect inspection of a large aperture surface

Published:2017-08-25 Issue:25 Volume:56 Page:7089
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Dong Jingtao

Funder

Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences (SIOM)

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference22 articles.

1. Large Optics for the National Ignition Facility

2. Development of practical damage mapping and inspection systems

3. Optical metrology devices for high-power laser large optics

4. Microscopic scattering imaging measurement and digital evaluation system of defects for fine optical surface

5. Dark-field microscopic image stitching method for surface defects evaluation of large fine optics

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1. Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements;Photonics;2024-07-22

2. Improving the reliability of deep learning computational ghost imaging with prediction uncertainty based on neighborhood feature maps;Applied Optics;2024-05-01

3. Balancing the Efficiency and Sensitivity of Defect Inspection of Non-Patterned Wafers with TDI-Based Dark-Field Scattering Microscopy;Sensors;2024-03-01

4. 光谱共焦显微技术研究进展;Laser & Optoelectronics Progress;2024

5. Multi-detector simultaneous sampling design in the spot-scanning defects detection system;Journal of Instrumentation;2023-11-01

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