Automatic Defect Detection Instrument for Spherical Surfaces of Optical Elements

Abstract

In order to realize automatic surface defect detection for large aperture precision spherical optical elements, an automatic surface defect detection instrument has been designed. The instrument consists of a microscopic imaging system, illumination system, motion scanning system, and a software algorithm system. Firstly, a multi-angle channel illumination source and a coaxial illumination source were designed. Bright and dark field images of surface defects were captured by cooperating with an automatic zoom microscope. Then, algorithms for scanning trajectory planning, image stitching, and intelligent defect recognition were designed to achieve full-aperture surface image acquisition and defect quantification detection. The automated defect detection process of the instrument is summarized and introduced. Finally, the experimental platform was constructed, which can work well for the optical elements with a maximum diameter of 400 mm and a relative aperture R/D value of 1. It takes about 15 min to detect an optical element with a diameter of 200 mm in dark-field imaging mode. As a result, the minimum line width of scratch detectable is 2 μm and the minimum diameter of pitting detectable is 4 μm. Clearly, the instrument can realize the automatic detection of surface defects of spherical optical elements, and has the advantages of a high efficiency, stability, reliability, quantification, and data traceability.