Investigation of the tool influence function neighborhood effect in atmospheric pressure plasma processing based on an innovative reverse analysis method-Reference-Cited by-同舟云学术

Investigation of the tool influence function neighborhood effect in atmospheric pressure plasma processing based on an innovative reverse analysis method

Published:2021-09-15 Issue:20 Volume:29 Page:31376
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Ji Peng,Li Duo^ORCID,Su Xing,Jin Yuan,Qiao Zheng,Wang Bo,Ding Fei

Funder

National Natural Science Foundation of China

Natural Science Foundation of Heilongjiang Province

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference16 articles.

1. Optimization of computer controlled polishing

2. Advanced matrix-based algorithm for ion-beam milling of optical components

3. Zernike mapping of optimum dwell time in deterministic fabrication of freeform optics

4. RIFTA: A Robust Iterative Fourier Transform-based dwell time Algorithm for ultra-precision ion beam figuring of synchrotron mirrors

5. Fabrication of continuous phase plates with small structures based on recursive frequency filtered ion beam figuring

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4. Compensation of the tool influence function changes under neighborhood effect in atmospheric pressure plasma processing;Optics Express;2023-11-06

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