Combined wavelength and frequency modulation spectroscopy: a novel diagnostic tool for materials processing
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Publisher
The Optical Society
Reference45 articles.
1. In situ infrared diagnostics of particle forming etch plasmas
2. Measurement of rotational temperature and dissociation in N2O glow discharges usinginsituFourier transform infrared spectroscopy
3. Red and near-infrared inductively coupled plasma emission spectra of fluorine, chlorine, bromine, iodine, and sulfur with a photodiode array detector
4. On the use of actinometric emission spectroscopy in SF6-O2 radiofrequency discharges: Theoretical and experimental analysis
5. Measurement of spatially resolved gas‐phase plasma temperatures by optical emission and laser‐induced fluorescence spectroscopy
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