Visible to near-infrared single pixel microspectrometer using electrothermal MEMS grating

Abstract

Compact spectrometers facilitate non-destructive and point-of-care spectral analysis. Here we report a single-pixel microspectrometer (SPM) for visible to near-infrared (VIS-NIR) spectroscopy using MEMS diffraction grating. The SPM consists of slits, electrothermally rotating diffraction grating, spherical mirror, and photodiode. The spherical mirror collimates an incident beam and focuses the beam on the exit slit. The photodiode detects spectral signals dispersed by electrothermally rotating diffraction grating. The SPM was fully packaged within 1.7 cm3 and provides a spectral response range of 405 nm to 810 nm with an average 2.2 nm spectral resolution. This optical module provides an opportunity for diverse mobile spectroscopic applications such as healthcare monitoring, product screening, or non-destructive inspection.