Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry

Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry–Pérot filter

Published:2024-07-01 Issue:7 Volume:14 Page:
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:

Author:

Sahani Pratyasha¹^ORCID,Nabana Shiori¹,Okatani Taiyu¹^ORCID,Inomata Naoki¹^ORCID,Kanamori Yoshiaki¹^ORCID

Affiliation:

1. Department of Robotics, Graduate School of Engineering, Tohoku University , Sendai, Miyagi 980-8579, Japan

Abstract

We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air gap dimension in the tunable air gap FPF. The wavelength calibration is performed by utilizing the spectrally-selective and spatially-resolved transmission characteristics of the tunable air gap FPF and the static gradient thickness filter, respectively. The MEMS-compatible chip-level integration of the static gradient thickness filter facilitates device miniaturization to enable its use in handheld devices.

Publisher

AIP Publishing

Link

https://pubs.aip.org/aip/adv/article-pdf/doi/10.1063/5.0214684/20026093/075006_1_5.0214684.pdf

Reference34 articles.

1. Miniature spectroscopic instrumentation: Applications to biology and chemistry

2. Application of miniature spectrometer in liquid signature analysis technology

3. On-chip near-infrared spectroscopy of CO2 using high resolution plasmonic filter array

4. Miniature and Fieldable Mass Spectrometers: Recent Advances

5. State-of-the-Art in Integrated Optical Microspectrometers