Alignment-free characterization of 2D gratings-Reference-Cited by-同舟云学术

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Alignment-free characterization of 2D gratings

Published:2016-01-07 Issue:2 Volume:55 Page:317
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Madsen Morten Hannibal,Boher Pierre,Hansen Poul-Erik,Jørgensen Jan Friis

Funder

European Commission-EMPIR

European Commission-Eurostars

The Danish Agency for Science, Technology and Innovation

Publisher

The Optical Society

Reference19 articles.

1. A compact grating-stabilized diode laser system for atomic physics

2. Review and status of wavelength-division-multiplexing technology and its application

3. Picometer-scale accuracy in pitch metrology by optical diffraction and atomic force microscopy

4. Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

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1. J2 *: A New Method for Alignment-free Sequence Similarity Measurement;2020 IEEE International Conference on Bioinformatics and Biomedicine (BIBM);2020-12-16

2. Uncertainty Estimation and Design Optimization of 2D Diffraction-Based Overlay Metrology Targets;ACS Photonics;2020-08-26

3. Dimensional artefacts to achieve metrological traceability in advanced manufacturing;CIRP Annals;2020

4. Modeling, measuring, and using BRDFs: significant French contributions;Journal of the Optical Society of America A;2019-10-21

5. A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology;Measurement Science and Technology;2018-05-23

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