Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope-Reference-Cited by-同舟云学术

Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

Published:2003-10-06 Issue:12 Volume:14 Page:2065-2074
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Misumi Ichiko,Gonda Satoshi,Kurosawa Tomizo,Tanimura Yoshihisa,Ochiai Naofumi,Kitta Jun-ichiro,Kubota Fumio,Yamada Mitsuhiko,Fujiwara Yoshinobu,Nakayama Yoshinori,Takamasu Kiyoshi

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference15 articles.

1. Real-time, interferometrically measuring atomic force microscope for direct calibration of standards

2. Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

3. Linewidth Measurement of Photomask Pattern for LSI. Measurement Results in Japan.

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