Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference13 articles.
1. Design of an atomic force microscope with interferometric position control
2. Long-range AFM profiler used for accurate pitch measurements
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4. Lateral metrology using scanning probe microscopes, 2D pitch standards and image processing
5. Real-time, interferometrically measuring atomic force microscope for direct calibration of standards
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