Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics-Reference-Cited by-同舟云学术

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Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics

Published:2016-02-16 Issue:6 Volume:55 Page:1249
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Chkhalo N. I.,Churin S. A.,Mikhaylenko M. S.,Pestov A. E.,Polkovnikov V. N.,Salashchenko N. N.,Zorina M. V.

Funder

Russian Foundation for Basic Research (RFBR)

Ministry of Education and Science of the Russian Federation

Institute for Physics of Microstructures of the Russian Academy of Sciences (IPM RAS)

Publisher

The Optical Society

Reference40 articles.

1. Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology

2. Development status of projection optics and illumination optics for EUV1

3. Complete sub-aperture pre-polishing and finishing solution to improve speed and determinism in asphere manufacture

4. Supersmooth polishing with sub-angstron roughness

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