Optimization of selective laser etching (SLE) for glass micromechanical structure fabrication
Author:
Funder
European Regional Development Fund
Lietuvos Mokslo Taryba
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference51 articles.
1. Hybrid chemical etching of femtosecond laser irradiated structures for engineered microfluidic devices
2. Selective Laser-Induced Etching of 3D Precision Quartz Glass Components for Microfluidic Applications—Up-Scaling of Complexity and Speed
3. Optimization of selective laser-induced etching (SLE) for fabrication of 3D glass microfluidic device with multi-layer micro channels
4. Shape memory alloys for microsystems: A review from a material research perspective
5. Microcutting and Hollow 3D Microstructures in Glasses by In-volume Selective Laser-induced Etching (ISLE)
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