Affiliation:
1. Optilayer GmbH
2. Max-Planck Institute of Quantum Optics
3. Ruđer Bošković Institute
Abstract
A post-production characterization approach based on spectral
photometric and ellipsometric data related to a specially prepared set
of samples is proposed. Single-layer (SL) and multilayer (ML) sets of
samples presenting building blocks of the final sample were measured
ex-situ, and reliable thicknesses and
refractive indices of the final ML were determined. Different
characterization strategies based on ex-situ measurements of the final ML sample were tried,
reliability of their results was compared, and the best
characterization approach for practical use, when preparation of the
mentioned set of samples would be a luxury, is proposed.
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
1 articles.
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