Initiator-free photo-cross-linkable cellulose-based resists for fabricating submicron patterns via direct laser writing

Author:

Rothammer Maximilian1,Meiers Dominic T.2ORCID,Maier Maximilian1,von Freymann Georg23ORCID,Zollfrank Cordt1

Affiliation:

1. Technical University of Munich

2. RPTU Kaiserslautern–Landau

3. Fraunhofer Institute for Industrial Mathematics ITWM

Abstract

Novel bifunctional cellulose diacetate derivatives were synthesized in order to achieve bio-based photoresists, which can be structured by two-photon absorption via direct laser writing (DLW) without the need to use a photoinitiator. Therefore, cellulose diacetate is functionalized with thiol moieties and olefinic or methacrylic side groups enabling thiol-conjugated cross-linking. These cellulose derivatives are also photo-cross-linkable via UV irradiation (λ=254nm and 365 nm) without using an initiator.

Funder

Deutsche Forschungsgemeinschaft

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Statistical and Nonlinear Physics

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