Iterative blind deconvolution method for dwell-time adjustment

Abstract

Negative values occur in the calculation results when a fast Fourier transform is used in the algorithm to calculate the dwell time via the dwell-time adjustment algorithm for optical element grinding. In the present study, a processing method for negative values is used in the Fourier iterative Ayers–Dainty (AD) algorithm. The method in which the range of the unit removal shape was adopted in the AD algorithm resulted in a smaller error and enabled the error to be minimized using the quantized dwell-time distribution output.