Dwell time for optical fabrication using the modified discrete convolution matrix method

Author:

Liu Ximing123ORCID,Li Longxiang123ORCID,Li Xingchang123,Zhang Feng123,Zhang Xuejun123

Affiliation:

1. University of Chinese Academy of Sciences

2. State Key Laboratory of Applied Optics

3. Chinese Academy of Sciences

Abstract

More accurate dwell time calculation methods are necessary to achieve superior error convergence in producing optically critical components. Although the discrete convolution matrix method finds widespread application, it still has approximate errors in the non-uniform discrete form of tool paths. To address this issue, this paper introduced a modified matrix elements method and presented the general Voronoi polygon area weight calculation forms under different tool path discretization forms. The mechanism is explained through analysis and the validity is verified by numerical simulation. The modified method significantly improved uniformity distribution and accuracy in computation of surface residuals. This improvement holds promise as a guiding principle for the fabrication of ultra-precision optical components.

Funder

National Natural Science Foundation of China

Youth Innovation Promotion Association of the Chinese Academy of Sciences

National Key Research and Development Program of China

Publisher

Optica Publishing Group

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