Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier

Published:2013-03-12 Issue:6 Volume:38 Page:881
ISSN:0146-9592
Container-title:Optics Letters
language:en
Short-container-title:Opt. Lett.

Author:

Nowak Krzysztof M.,Ohta Takeshi,Suganuma Takashi,Fujimoto Junichi,Mizoguchi Hakaru

Funder

New Energy Development Organization (NEDO)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference15 articles.

1. Lithography gets extreme

2. Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

3. Characterization of various Sn targets with respect to debris and fast ion generation

4. Comparative study on EUV and debris emission from CO2and Nd: YAG laser-produced tin plasmas

5. Development of the reliable 20 kW class pulsed carbon dioxide laser system for LPP EUV light source

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 1 kHz Oscillation of short-pulse CO2 laser pumped by longitudinal discharge without pre-ionization;Optics & Laser Technology;2022-08

2. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

3. EUV Sources;Handbook of Laser Micro- and Nano-Engineering;2021

4. Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography;Chinese Optics;2020

5. Key components development progress updates of the 250W high-power LPP-EUV light source;Extreme Ultraviolet (EUV) Lithography IX;2018-03-19

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3