Affiliation:
1. Oak Ridge National Laboratory
2. University of Toledo
Abstract
The optical functions of anisotropic materials can be determined using
generalized ellipsometry, which can measure the cross-polarization
coefficients (CPs) of the sample surface reflections. These CPs have
several symmetry relations with respect to the symmetry of the
crystal. This paper explores the symmetry relations of these CPs for
uniaxial, orthorhombic, and monoclinic crystals and the requirements
for generalized ellipsometry. Several ellipsometry measurement
configurations are examined, including the requirements for the
accurate measurements of the dielectric functions of anisotropic
crystals.
Funder
Office of Nuclear Energy
Oak Ridge National
Laboratory
Air Force Research
Laboratory
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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