Wavefront correction in the extreme ultraviolet wavelength range using piezoelectric thin films
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference40 articles.
1. Impact of thermal and structural effects on EUV lithographic performance
2. Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography
3. Transient Thermal and Structural Deformation and Its Impact on Optical Performance of Projection Optics for Extreme Ultraviolet Lithography
4. Analysis and control of thermal and structural deformation of projection optics for 22-nm EUV lithography
5. Validation of a new adaptive deformable mirror concept
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Influence of the Template Layer on the Structure and Ferroelectric Properties of PbZr0.52Ti0.48O3 Films;ACS Omega;2022-06-17
2. Epitaxial ferroelectric oxides on silicon with perspectives for future device applications;APL Materials;2021-04-01
3. Hysteresis, Loss and Nonlinearity in Epitaxial PbZr 0.55 Ti 0.45 O 3 Films: A Polarization Rotation Model;Advanced Functional Materials;2020-09-23
4. Comparative study of piezoelectric response and energy-storage performance in normal ferroelectric, antiferroelectric and relaxor-ferroelectric thin films;Thin Solid Films;2020-03
5. Multilayer X-ray interference structures;Physics-Uspekhi;2019-11-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3