Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography-Reference-Cited by-同舟云学术

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Thermal and structural deformation and its impact on optical performance of projection optics for extreme ultraviolet lithography

Published:2003 Issue:1 Volume:21 Page:127
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Li Yanqiu,Ota Kazuya,Murakami Katsuhiko

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 极紫外光刻机曝光系统光学设计研究与进展;Acta Optica Sinica;2023

2. Effect of Thermal Deformation on Imaging Performance for 16 nm Extreme Ultraviolet Lithography Objective;Acta Optica Sinica;2019

3. Modeling and simulating the thermoelastic deformation of mirrors using transient multilayer models;Mechatronics;2018-08

4. Deformation control of a thermal active mirror;Mechatronics;2016-11

5. Aspherical surfaces design for extreme ultraviolet lithographic objective with correction of thermal aberration;Optical Engineering;2016-09-29

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