Optimizing precision of fixed-polarizer, rotating-polarizer, sample, and fixed-analyzer spectroscopic ellipsometry-Reference-Cited by-同舟云学术

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Optimizing precision of fixed-polarizer, rotating-polarizer, sample, and fixed-analyzer spectroscopic ellipsometry

Published:2000-12-01 Issue:34 Volume:39 Page:6390
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Huang Zhiming,Chu Junhao

Publisher

The Optical Society

Reference13 articles.

1. A high speed precision automatic ellipsometer

2. Design and Operation of ETA, an Automated Ellipsometer

3. Optimizing precision of rotating-analyzer ellipsometers

4. Scanning ellipsometer by rotating polarizer and analyzer

5. Design of a scanning ellipsometer by synchronous rotation of the polarizer and analyzer

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Measurement uncertainty evaluation procedures and applications for various types of multichannel rotating-element spectroscopic ellipsometers;Optics Express;2021-11-10

2. Universal evaluation of combined standard uncertainty for rotating-element spectroscopic ellipsometers;Optics Express;2016-11-03

3. Universal evaluations and expressions of measuring uncertainty for rotating-element spectroscopic ellipsometers;Optics Express;2015-06-12

4. Design of a real-time spectroscopic rotating compensator ellipsometer without systematic errors;Thin Solid Films;2014-11

5. A spectroscopic ellipsometer using rotating polarizer and analyzer at a speed ratio 1:1 and a compensator;Optical and Quantum Electronics;2013-10-15

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