Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference22 articles.
1. Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy
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5. Ultra-precise characterization of LCLS hard X-ray focusing mirrors by high resolution slope measuring deflectometry
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