Stress and wavefront measurement of large-aperture optical components with a ptychographical iterative engine

Author:

Sun Xiaomeng12,Zhang Xuejie2,Liu Zhigang2,Fan Quantang2,Liu Cheng2,Zhu Jianqiang12

Affiliation:

1. University of Science and Technology of China

2. Chinese Academy of Sciences

Abstract

The clamping stress of large-aperture optical elements has a significant influence on the optical quality of the system. In this study, a comprehensive measurement system combined with ptychographical iterative engine (PIE) wavefront sensors and polarization components is developed to determine the stress distribution of the optical elements and its effect on the transmitted and reflected wavefronts. This system avoids the use of multiple measuring instruments and has low cost and strong anti-interference ability. The experimental results demonstrate that the stress distributions measured at different resolutions are consistent with the finite element analysis, and the wavefront measurement accuracy is 0.1 λ . This test configuration is very flexible and provides a useful means for online installation and quality control of large-aperture optical systems.

Funder

National Natural Science Foundation of China

Shanghai Science and Technology Innovation Action Plan Project

Scientific Instrument Developing Project

Chinese Academy of Sciences

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

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