Characterization of AlF_3 thin films at 193 nm by thermal evaporation
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Publisher
The Optical Society
Reference14 articles.
1. Vacuum ultraviolet thin films 1: Optical constants of BaF_2, CaF_2, LaF_3, MgF_2, Al_2O_3, HfO_2, and SiO_2 thin films
2. Materials for optical coatings in the ultraviolet
3. Development of optical coatings for 157-nm lithography I Coating materials
4. Film structure and optical constants of magnetron-sputtered fluoride films for deep ultraviolet lithography
5. Ultraviolet optical and microstructural properties of MgF_2 and LaF_3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
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