Author:
Zhao Jia,Wang Lin,Zhang Weili,Yi Kui,Shao Jianda
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. Characteristics of deep UV optics at 193nm & 157nm;Callahan;Proc. SPIE,1998
2. Coatings for next generation lithography;Zaczek;Proc. SPIE,2008
3. J. Wang, C.R. Clar, H. Schreiber, Extended lifetime of fluoride optics, Proc. SPIE 6720, 6720l1-9, 2007.
4. Far ultraviolet optical properties of MgF2 films deposited by ion-beam sputtering and their application as protective coatings for Al;Larruquert;Opt. Commun.,2003
5. Development of optical coatings for 157-nm lithography. I. Coating materials;Niisaka;Appl. Opt.,2002
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