Author:
Perner Lukas W.,Truong Gar-Wing,Follman David,Prinz Maximilian,Winkler Georg,Puchegger Stephan,Cole Garrett D.,Heckl Oliver H.
Abstract
We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.