Author:
Zhang Yuqian,Sun Changzheng,Xiong Bing,Wang Lai,Hao Zhibiao,Wang Jian,Han Yanjun,Li Hongtao,Gan Lin,Luo Yi
Abstract
Suspended AlGaAs microring resonators are formed by combined plasma dry etching and chemical wet etching, exhibiting an intrinsic Q factor exceeding 1 million. Kerr comb generation with milliwatt level pump power is recorded.