Author:
Volodin Vladimir A.,Cheng Yuzhu,Bulgakov Alexander V.,Levy Yoann,Beránek Jiří,Nagisetty Siva S.,Zukerstein Martin,Popov Alexander A.,Bulgakova Nadezhda M.
Abstract
Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.