Abstract
This research introduces a compact, auto-aligning interferometer engineered for measuring translations with a wide angular working range and picometer precision above 1Hz. It presents a design ensuring automatic beam alignment during movement through secondary reflection from a corner reflector. The sensor head, a 20×10×10mm3 all-glass quasi-monolithic structure, exhibits a displacement sensitivity below 1pm/Hz1/2 above 1Hz and a wide angular working range of ±200mrad. This versatile optical design holds promise to improve the sensitivity in applications such as laser ranging, optical seismometers, precision manufacturing, and metrology.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China