Residual stress in Ta_2O_5-SiO_2 composite thin-film rugate filters prepared by radio frequency ion-beam sputtering
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Publisher
The Optical Society
Reference15 articles.
1. Spectral response calculations of rugate filters using coupled-wave theory
2. Codeposition of continuous composition rugate filters
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4. TaTiOx layers prepared by magnetron sputtering from separate metal targets
5. Rugate filter made with composite thin films by ion-beam sputtering
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