Fabrication and characteristics of rugate filters deposited by the TSH reactive sputtering method-Reference-Cited by-同舟云学术

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Fabrication and characteristics of rugate filters deposited by the TSH reactive sputtering method

Published:1998-11 Issue:6 Volume:16 Page:3384-3388
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Tang Qi,Matsuda Hideaki,Kikuchi Kazuo,Ogura Shigetaro

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581490

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering;Applied Optics;2010-10-25

2. Effect of Thermal Annealing on the Residual Stress of Graded-index-like Films Deposited by RF Ion-Beam Sputtering;Optical Interference Coatings;2010

3. Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films;IEICE Transactions on Electronics;2008-10-01

4. Optical and structural properties of Nb x Si y O composite films prepared by metallic co-sputtering process;Advances in Optical Thin Films III;2008-09-19

5. Residual stress in Ta_2O_5-SiO_2 composite thin-film rugate filters prepared by radio frequency ion-beam sputtering;Applied Optics;2007-12-18

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