Detailed subsurface damage measurement and efficient damage-free fabrication of fused silica optics assisted by ion beam sputtering-Reference-Cited by-同舟云学术

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Detailed subsurface damage measurement and efficient damage-free fabrication of fused silica optics assisted by ion beam sputtering

Published:2016-02-19 Issue:4 Volume:24 Page:4247
ISSN:1094-4087
Container-title:Optics Express
language:en
Short-container-title:Opt. Express

Author:

Liao Wenlin,Dai Yifan,Liu Zongzheng,Xie Xuhui,Nie Xuqing,Xu Mingjin

Funder

National Natural Science Foundation of China (NSFC)

National Natural Science Foundation of China (NSFC) 973 Program

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics

Reference20 articles.

1. Subsurface damage distribution characterization of ground surfaces using Abbott–Firestone curves

2. Subsurface damage measurement of ground fused silica parts by HF etching techniques

3. High fluence laser damage precursors and their mitigation in fused silica

4. Microscopic morphology evolution during ion beam smoothing of Zerodur^® surfaces

5. Ion beam figuring for lithography optics

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion beam smoothing of fused silica at atomic-scale assisted by damage recovery using inductively coupled plasma;Precision Engineering;2024-10

2. Surface quality and microstructure evolution in fused silica under SF6/Ar reactive ion beam etching;Journal of Non-Crystalline Solids;2024-10

3. Dark-field structured illumination microscopy for highly sensitive detection of 3D defects in optical materials;Optics and Lasers in Engineering;2023-02

4. Atomic understanding of the densification removal mechanism during chemical mechanical polishing of fused glass;Applied Surface Science;2022-07

5. 熔石英元件紫外脉冲激光辐照损伤特性研究进展综述;Acta Optica Sinica;2022

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