Author:
Li Lianyan,Shi Yuechun,Zhao Yong,Zhang Yunshan,Wang Wenxuan,Wu Yitao,Zhou Yinli,Zhang Xing,Chen Xiangfei
Funder
Chinese National Key Basic Research Special Fund
National Natural Science Foundation of China (NSFC)
Natural Science Foundation of Jiangsu Province of China
NUPTSF
Subject
Atomic and Molecular Physics, and Optics
Cited by
1 articles.
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1. 基于多层抗蚀剂的GaAs基微纳光栅深刻蚀工艺;Chinese Journal of Lasers;2022