基于多层抗蚀剂的GaAs基微纳光栅深刻蚀工艺
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Published:2022
Issue:3
Volume:49
Page:0313002
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Yang Jingjing 杨晶晶,Fan Jie 范杰,Ma Xiaohui 马晓辉,Zou Yonggang 邹永刚,Wang Qiqi 王琦琦
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
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