Sputtered Thin Films for Integrated Optics
Author:
Publisher
The Optical Society
Reference4 articles.
1. Barium Silicate Films for Integrated Optical Circuits
2. Optical Propagation in Sheet and Pattern Generated Films of Ta_2O_5
3. Deposition of Tantalum and Tantalum Oxide by Superimposed RF and D -C Sputtering
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