Laser processing of silicon with GHz burst pumped third harmonics for precise microfabrication

Abstract

Femtosecond laser processing has proved to be a valuable tool for various microfabrication applications. In order to further increase the quality and efficiency of femtosecond laser processing, processing with GHz burst mode lasers has gained attention in recent years, where packets of high-repetition rate pulses are used instead of single pulses at the fundamental repetition rate. However, the use of burst-pulses has mainly been limited to the fundamental wavelength of powerful regenerative amplifier systems, often near 1 micrometer wavelength. In this study, we explore the characteristics and potential benefits of further wavelength conversion of burst-pulses emitted at the near-infrared to the ultraviolet region via direct third-harmonic generation. We construct an in-line process evaluation setup with a chromatic confocal sensor, and evaluate the ablation characteristics of the burst-pumped and non-burst processing of silicon. We observe that burst-mode processing has significantly reduced surface roughness and debris, resulting in high-quality laser processing. To demonstrate the utility of such burst-pumped UV processing, we show the successful milling of a spherical structure enabled by in-line surface profile feedback, while similar processing with non-burst conditions did not work. We believe such results show the strong potential of burst laser sources for use in accurate microfabrication of structures with micrometer-scale resolution.