Author:
Licht L.,Eschen W.,Liu C.,Penagos Molina D. S.,Steinert M.,Siefke T.,Pertsch T.,Limpert J.,Rothhardt J.
Abstract
We present table-top EUV imaging at 13.5 nm. Using an EUV phase diffusor for generating a highly structured illumination, improves the image quality and resolution in ptychography and opens new avenues for single-shot EUV imaging.